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Typical Specification


Heating Zones 4
Cooling Zones 2
Loading Zones 1
Total Number of Zones 7
Platen Size 4.5 in. x 12 in. (114 x 305 mm)
Maximum Substrate Size 3.9 in. x 12 in. (100 x 305 mm)
Time Mode (Dwell & Travel Time) 7 sec. to 99 min. 59 sec. (per zone)
Temperature (Standard) Up to 420°C
Temperature Accuracy ± 2°C
Warm-up Time to 230°C 15 minutes
Coolant Flow 0.5 to 2 GPM (2 to 8 liters/min.)
Alarms Over/Under Temperature, Gas, Coolant, Motor Torque, SMEMA Interface
Parts Flow (Specify When Ordering) L to R or R to L, Back to Front or Front to Back
Gas Consumption 250-350 cubic feet per hour
O2 Level 10 PPM, 0.25 inch opening
Voltage (Specify when Ordering) 200 to 240 VAC, 50/60 Hz, 1 or 3 Phase
Start-up Power (kw) 11kW @ 240 VAC
Power Consumption 50% or less
Basic Unit Weight 500 lbs. (227 Kg)
Basic Unit Dimensions L 46 x W 38 x H 54 inches (L 117 x W 97 x H 137 cm)

System serial number must accompany spare parts order

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Indexer Wafer Handler



Click here for more information or contact our offices in Vietnam:
Ho Chi Minh Office
Phone: +84(8) 5446-4789
Email:
hcmc@acrosemi.com
Hanoi Office
Phone: +84(0) 91-225-7173
Email:
hanoi@acrosemi.com


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