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Typical Specification


Specifications Falcon 1200SB Falcon 1200WB
Heating Zones 7 7
Cooling Zone 2 1
Load Zones 1 N/A
Total Number of Zones 10 8
Platen Size 12.5 in. W X 13.5 in L. 12.5 in W x 13.5 in L
Minimum Substrate Size N/A 3 inches
Maximum Substrate Size 12 in. W X 12 in. L x 0.9 in. H 12 in W x 12 in L
Weight Limit N/A Approx. 2.5 lbs
Speed Mode (Inches per Minute 1 in. to 80 in. per min. N/A
Time Mode (Dwell & travel Time) 15 sec. To 99 min. 59 sec. (per Zone) 16 sec. – 99 min, 59 sec.
Temperature (Standard) Up to 420°C Up to 420C
Temperature Accuracy ±2°C +/- 2C
Warm-up Time to 230°C 15 minutes (approx.) 15 min. approx.
Coolant Flow 0.5 to 2 GPM .5 to 2 GPM
Alarms Over/Under Temperature, Gas Flow, Coolant Flow & Temperature, Motor Torque, SMEMA (or other) Interface Over/Under Temperature, Gas Flow, Coolant Flow and Temperature, Motor Torque, SMEMA (or other) Interface
Parts Flow (Specify) In-line: L to R or R to L L to R or R to L
Gas consumption 0-800 cubic feet/hour (process dependent) 1200 CFH
O2 Level <25 PPM (process dependent) <25 PPM (process dependent)
Voltage (Specify) 200-240 VAC, 50-60 HZ, 3 phase 200-240 VAC, 50-60 Hz, 3 Phase
Start-up Power 33 Kw @ 240 VAC 33 kW @ 240 VAC
Power Consumption 50% duty cycle or less (process dependent) 50% duty cycle or less (process dependent)
Basic Unit Weight 1000 lbs. 1000 lbs
Basic Unit Dimensions L 164 x W 24 X H 45 inches L 178 x W 24 x H 45 inches
L 178 with paddle adapters
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Indexer Wafer Handler



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Ho Chi Minh Office
Phone: +84(8) 5446-4789
Email:
hcmc@acrosemi.com
Hanoi Office
Phone: +84(0) 91-225-7173
Email:
hanoi@acrosemi.com


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