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 Multiple contact & proximity exposure modes
Wafer size from pieces to 200 mm diameter
Square substrate up to 7x7
Optical and CCTV splitfield microscope options
Simple topside mask loading
Manual tray loading feature
Modular design, easily configurable for wide variety of applications with available options:
• Robotic autoload handling
• Automatic alignment
• Optical (OBS) and Infrared (IR) backside alignment
• Large gap alignment
• UV / NUV / DUV Exposure optics
 Q7500 Data Sheet (210 KB)
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