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 Substrate size from pieces to 150 mm diameter
Manual X, Y and theta alignment stage
Vacuum / Pressure contact exposure modes
Optical Splitfield and CCTV microscope options
Simple, topside mask loading
User friendly
Low maintenance
Available Options:
• Infrared (IR) back side alignment
• Large gap alignment
• UV / NUV / DUV exposure optics
• Carousel loading
 Q4000-6 Data Sheet (146 KB)
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