 |
 Substrate size from pieces to 100 mm diameter
Manual X, Y and theta alignment stage
Vacuum / Pressure Contact Exposure Modes
Manual trayloading feature
Splitfield / Singlefield optical microscope
Simple, topside mask loading
User friendly
Low maintenance
Available Options:
• Infrared (IR) back side alignment
• UV / NUV exposure optics
• Carousel loading
• CCTV Viewing
 Q4000-4 Data Sheet (184 KB)
|
